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Semiconductor & Electronics

HF acid (hydrofluoric) is extremely corrosive to all metals Metal ion contamination can destroy wafer yield CMP slurry contains abrasive particles that destroy seals Zero particle shedding required for ultra-pu

抗高氟化 PTFE内衬 超纯 零泄漏

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Semiconductor fabrication plants  | commonly called "fabs"  | are among the most demanding environments on earth for fluid handling equipment. At nodes measured in nanometers, even a single particle of contamination can destroy an entire wafer, costing tens of thousands of dollars in lost yield. Meibao Pump has spent over two decades engineering pumping systems that operate at the intersection of chemical resistance, contamination control, and absolute reliability.

HF (hydrofluoric acid) is the backbone of semiconductor wafer cleaning and etching processes, and it is also one of the most aggressively corrosive chemicals known to engineering. Most pump materials fail within months in HF service. Meibao's fluorine-lined and PTFE/PVDF wet-end pumps are purpose-built for these media  | with wetted materials that resist HF attack at concentrations up to 49% and temperatures reaching 120°C.

Beyond HF, semiconductor fabs handle a cocktail of aggressive chemicals including HCl, HNO%? H%/O%? phosphoric acid, ammonium hydroxide (NH%%H), NMP (N-Methyl-2-pyrrolidone), and CMP (Chemical Mechanical Planarization) slurries. Each has its own corrosion profile and particulate-generation risk. Meibao engineers select the right material, seal configuration, and drive system for every fluid  | eliminating contamination events before they happen.

Quick Reference

Why Semiconductor Fabs
Push Pumps to the Limit

Semiconductor fabrication presents a unique combination of chemical aggression, contamination sensitivity, and zero-tolerance safety requirements that most pump manufacturers are not equipped to meet.

HF Acid Corrosion
Hydrofluoric acid etches glass, silicon, and most metallic pump components. Standard 316L stainless steel fails within weeks. Standard PTFE degrades under thermal cycling. Specialized fluoropolymers with precise alloy matching are the only viable solution in HF service.
Contamination & Particle Generation
A single particle contamination event on a 300mm wafer at 5nm node can destroy $50,000+ in product. Pump bearing wear, seal face contact, and material outgassing all generate particles. Sealless magnetic drive pumps eliminate this risk entirely.
EHS & Zero-Leakage Requirements
HF leaks are a critical safety event. Gaseous HF exposure is lethal at extremely low concentrations. Semiconductor fabs require zero10綋 (zero liquid) leakage across all chemical handling systems. Mechanical seal pumps cannot guarantee this  | sealless designs can.

Purpose-Built Pumping Technology
for Every Semiconductor Process

Meibao Pump's engineering team works directly with fab process engineers to specify the right wet-end materials, drive configuration, and system integration for each application.

PTFE / PVDF Wet-End Materials
Meibao's MB-F fluorine-lined pumps feature full PTFE or PVDF wetted components  | chemically inert to HF, HCl, HNO%? H%/O%? phosphoric acid, NH%%H, and most organic solvents used in semiconductor processes. Operating to 120°C.
NdFeB Magnetic Drive  | Sealless
Meibao's MB-MD magnetic drive pumps use high-energy NdFeB (Neodymium Iron Boron) permanent magnets to transmit torque through a hermetically sealed containment shell. Zero dynamic seals. Zero leakage. Zero contamination path. ATEX Zone 2 models available.
CMP Slurry & DI Water Systems
For CMP (Chemical Mechanical Planarization) slurry transfer and ultra-pure DI water circulation, Meibao's MV-S vertical sump pumps and 316L stainless models handle high-particulate slurries and deionized water with minimal particle generation and zero metallic ion leaching.

Recommended Pumps for
Semiconductor & Electronics

Each pump model is available in multiple material configurations to match the exact chemical and thermal requirements of your process.

TF direct-coupled fan Recommended
TF direct-coupled fan
210000m³/h Max Flow -m Max Head -kW Power 80°CMax Temp 3250PaMax Pressure -Warranty
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GTF high pressure series fans Recommended
GTF high pressure series fans
High Pressure Fan, FRP Fan, Centrifugal Fan, Corrosion Resistant, Acid Alkali Resistant, Energy Saving, Low Noise, Low Vibration, AMCA Certified, Chemical Exhaust, Waste Gas Treatment, High Pressure 4500Pa
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FRP medium and low pressure series fans Recommended
FRP medium and low pressure series fans
FRP Fan, Centrifugal Fan, Corrosion Resistant, Acid Alkali Resistant, Medium Low Pressure, Energy Saving, Low Noise, Low Vibration, AMCA Certified, Chemical Exhaust, Waste Gas Treatment, Sewage Deodorization
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Fluorine lined centrifugal pump Recommended
Fluorine lined centrifugal pump
Fluorine Lined Pump, Centrifugal Pump, F46 Lining, PVDF, Corrosion Resistant, Idling Capable, Anti-Cavitation, High Temperature 110°C, Compact Design, Chemical Transfer, Wastewater Treatment, Explosion-Proof, OEM Available
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View All Products
70%
Less Maintenance
%?20K
Annual Savings
12
Pumps Replaced
0
Leakage Events
Wastewater & Exhaust Gas Treatment India

AAL Electroplating Pickling Case Study-123

A large automotive parts manufacturer operated 48 hard chrome plating tanks. Mechanical seal wear caused CrC/g contamination in the floor drainage. Three workers required medical attention from exposure. Annual mechanical seal replacement cost exceeded %?20,000.

How an Indian electroplating facility reduced downtime and acid-related corrosion by switching to PPH vertical pumps for mixed-acid pickling circulation.


Zero-Leakage Vertical Pickling Pump: 450 L/min, 7+ Months of Continuous Operation.

Need Help Selecting the Right Pump for Your Process?

Our industry application engineers have direct process experience. Share your process data sheet and we'll provide a detailed pump recommendation with material selection, model number, and expected performance curve — typically within 48 hours.

Response Time
48-Hour Technical Reply
Expert Engineers
Direct Process Experience
Documentation
Performance Curves & PDS Included
Sample Lead Time
4-6 Weeks Standard