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Home Applications Semiconductor Industry

Semiconductor Industry

Highly corrosive chemicals cause corrosion and metal contamination, requiring high-purity wetted parts.CMP slurries with abrasive particles can agglomerate and settle, requiring low-shear, wear-resistant pumps.Precise chemical dosing is critical, with dos

UltraHighPurity CMPslurry PhotolithographyChemicals UPWcirculation ZeroParticleGeneration Semiconductor Industry
Why Semiconductor Industry

Semiconductor Industry · Ultra-High-Purity Fluid Handling Solutions

Semiconductor manufacturing requires high-purity, corrosion-resistant, and precise fluid handling for processes such as wet etching, CMP, photolithography, and chemical distribution.

Meibao provides fluoroplastic centrifugal pumps, magnetic drive pumps, and diaphragm metering pumps for safe and reliable handling of corrosive chemicals, abrasive slurries, and ultrapure fluids.

  • High-purity materials for low contamination risk

  • Low-shear designs for CMP slurry handling

  • Precise dosing for stable chemical delivery

  • Zero-leakage designs for safer chemical systems

Quick Reference
Maximum Flow
1,200 m³/h (MB Series)
Maximum Head
50 m (MB Multi-Stage)
Temperature Range
-40°C to +180°C (material-dependent)
Maximum Working Pressure
4.0 MPa (MB Series)
Particle Generation
< 0.1 particles/mL > 0.05 μm
The Challenge

Key Challenges in Semiconductor Fluid Handling

Semiconductor processes demand extreme chemical resistance, ultra-clean fluid handling, and reliable chemical changeover. Even trace particles, metal contamination, or chemical residues can affect process stability and wafer yield.

High Corrosion & Purity Requirements
Highly corrosive chemicals can damage conventional materials and cause metal ion contamination, affecting wafer quality and yield.
Particle & Metal Contamination
Particles and trace metals from pumps can contaminate chemicals, cause defects, and reduce semiconductor yield.
Chemical Changeover & Cleaning
Residual chemicals and dead-leg areas can increase cleaning time and contamination risks during chemical changeover.
Meibao Solutions

Advanced Fluid Handling Solutions for Semiconductor Manufacturing

Meibao provides high-purity, corrosion-resistant, and low-contamination pumping solutions for demanding semiconductor processes. Our pump technologies help ensure safe chemical handling, stable fluid delivery, and reliable contamination control.

Thick Liner & Alloy Protection
PFA-lined wetted parts and specialty alloys provide excellent corrosion resistance for harsh chemicals and high-temperature applications.
Zero-Leakage Magnetic Drive
Sealed magnetic drive technology eliminates mechanical seal leakage and reduces particle contamination risks.
Sanitary Zero-Dead-Leg Design
Low-residual flow paths and CIP/SIP capability simplify chemical changeover and help maintain high-purity conditions.
Product Range

Recommended Pumps for
Semiconductor Industry

Each pump model is available in multiple material configurations to match the exact chemical and thermal requirements of your process.

Metal Centrifugal Fan Recommended
Metal Centrifugal Fan
160,000m³/h Max Flow -m Max Head 2.2 - 132kW Power 80°CMax Temp 3,200PaMax Pressure -Warranty
View Details
FRP Direct-Coupled Centrifugal Fan Recommended
FRP Direct-Coupled Centrifugal Fan
36,000m³/h Max Flow -m Max Head -kW Power 80°CMax Temp 3,500PaMax Pressure -Warranty
View Details
FRP Direct-Coupled Centrifugal Fan Recommended
FRP Direct-Coupled Centrifugal Fan
36,000m³/h Max Flow -m Max Head -kW Power 80°CMax Temp 2,500PaMax Pressure -Warranty
View Details
GTF high pressure series fans Recommended
GTF high pressure series fans
80,000m³/h Max Flow -m Max Head -kW Power 80°CMax Temp 4,500PaMax Pressure -Warranty
View Details
View All Products
70%
Less Maintenance
%?20K
Annual Savings
12
Pumps Replaced
0
Leakage Events
Wastewater & Exhaust Gas Treatment India

AAL Electroplating Pickling Case Study-123

The Problem
A large automotive parts manufacturer operated 48 hard chrome plating tanks. Mechanical seal wear caused CrC/g contamination in the floor drainage. Three workers required medical attention from exposure. Annual mechanical seal replacement cost exceeded %?20,000.

Our Solution

How an Indian electroplating facility reduced downtime and acid-related corrosion by switching to PPH vertical pumps for mixed-acid pickling circulation.


The Result
Zero-Leakage Vertical Pickling Pump: 450 L/min, 7+ Months of Continuous Operation.
MB-MD Magnetic Drive Pump PVDF Wet-End 12 Units
View Full Case Study
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Explore Other Application Areas

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Technical Consultation

Need Help Selecting the Right Pump for Your Process?

Our industry application engineers have direct process experience. Share your process data sheet and we'll provide a detailed pump recommendation with material selection, model number, and expected performance curve — typically within 48 hours.

Request Technical Consultation Get a Quote
Response Time
48-Hour Technical Reply
Expert Engineers
Direct Process Experience
Documentation
Performance Curves & PDS Included
Sample Lead Time
4-6 Weeks Standard