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Home Applications Semiconductor Industry

Semiconductor Industry

Highly corrosive chemicals cause corrosion and metal contamination, requiring high-purity wetted parts.CMP slurries with abrasive particles can agglomerate and settle, requiring low-shear, wear-resistant pumps.Precise chemical dosing is critical, with dos

UltraHighPurity CMPslurry PhotolithographyChemicals UPWcirculation ZeroParticleGeneration Semiconductor Industry
Why Semiconductor Industry

Semiconductor Industry · Ultra-High-Purity Fluid Handling Solutions

Semiconductor manufacturing requires high-purity, corrosion-resistant, and precise fluid handling for processes such as wet etching, CMP, photolithography, and chemical distribution.

Meibao provides fluoroplastic centrifugal pumps, magnetic drive pumps, and diaphragm metering pumps for safe and reliable handling of corrosive chemicals, abrasive slurries, and ultrapure fluids.

  • High-purity materials for low contamination risk

  • Low-shear designs for CMP slurry handling

  • Precise dosing for stable chemical delivery

  • Zero-leakage designs for safer chemical systems

Quick Reference
Maximum Flow
1,200 m³/h (MB Series)
Maximum Head
50 m (MB Multi-Stage)
Temperature Range
-40°C to +180°C (material-dependent)
Maximum Working Pressure
4.0 MPa (MB Series)
Particle Generation
< 0.1 particles/mL > 0.05 μm
The Challenge

Key Challenges in Semiconductor Fluid Handling

Semiconductor processes demand extreme chemical resistance, ultra-clean fluid handling, and reliable chemical changeover. Even trace particles, metal contamination, or chemical residues can affect process stability and wafer yield.

High Corrosion & Purity Requirements
Highly corrosive chemicals can damage conventional materials and cause metal ion contamination, affecting wafer quality and yield.
Particle & Metal Contamination
Particles and trace metals from pumps can contaminate chemicals, cause defects, and reduce semiconductor yield.
Chemical Changeover & Cleaning
Residual chemicals and dead-leg areas can increase cleaning time and contamination risks during chemical changeover.
Meibao Solutions

Advanced Fluid Handling Solutions for Semiconductor Manufacturing

Meibao provides high-purity, corrosion-resistant, and low-contamination pumping solutions for demanding semiconductor processes. Our pump technologies help ensure safe chemical handling, stable fluid delivery, and reliable contamination control.

Thick Liner & Alloy Protection
PFA-lined wetted parts and specialty alloys provide excellent corrosion resistance for harsh chemicals and high-temperature applications.
Zero-Leakage Magnetic Drive
Sealed magnetic drive technology eliminates mechanical seal leakage and reduces particle contamination risks.
Sanitary Zero-Dead-Leg Design
Low-residual flow paths and CIP/SIP capability simplify chemical changeover and help maintain high-purity conditions.
Product Range

Recommended Pumps for
Semiconductor Industry

Each pump model is available in multiple material configurations to match the exact chemical and thermal requirements of your process.

Stainless Steel Vertical Pump Recommended
Stainless Steel Vertical Pump
96 m³/h Max Flow 39 m Max Head 0.37-11.19kW Power -Max Temp -Max Pressure -Warranty
View Details
Out-of-Tank Vertical Chemical Pump Recommended
Out-of-Tank Vertical Chemical Pump
110 m³/h Max Flow 36 m Max Head 0.75-22.371kW Power -Max Temp -Max Pressure -Warranty
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Vortex chemical centrifugal pump Recommended
Vortex chemical centrifugal pump
230 m³/h Max Flow 48m Max Head 11-22kW Power 90 °CMax Temp 4.8 kgMax Pressure -Warranty
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Fluorine lined centrifugal pump Recommended
Fluorine lined centrifugal pump
300m³/h Max Flow 55m Max Head 0.75-22.4kW Power 110°CMax Temp -Max Pressure 3 yearsWarranty
View Details
View All Products
Wastewater & Exhaust Gas Treatment Vietnam

Anti-Clogging Self-Priming Pump for Wastewater Lifting: 380 L/min Stable Flow, 0 Leakage, Annual Savings

The Problem
Vinh Hao Industrial Wastewater Treatment Station is located in an industrial park in Vietnam. It is responsible for treating industrial wastewater from several factories in the park. One of the key processes is the wastewater lifting system, which transfers industrial wastewater collected in the equalization tank to the downstream biological treatment units.
Our Solution

The customer's three main problems—clogging, leakage, and self-priming failure—were closely connected:

• To prevent clogging, the impeller needs wide flow passages that can handle solid particles.

• To prevent leakage, the traditional shaft seal needs to be removed.

• To ensure reliable self-priming, the pump needs strong air-water separation and self-priming capability.


The Result
Since installation and commissioning were completed in December 2025, the 8 MA-50032L self-priming pumps at Vinh Hao Wastewater Treatment Station have operated continuously for more than 8 months.
Self-Priming Pump Wastewater Treatment Anti-Clogging FRPP Pump Sewage Lifting Case Study
View Full Case Study
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Explore Other Application Areas

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Technical Consultation

Need Help Selecting the Right Pump for Your Process?

Our industry application engineers have direct process experience. Share your process data sheet and we'll provide a detailed pump recommendation with material selection, model number, and expected performance curve — typically within 48 hours.

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Response Time
48-Hour Technical Reply
Expert Engineers
Direct Process Experience
Documentation
Performance Curves & PDS Included
Sample Lead Time
4-6 Weeks Standard